RORZE offers both atmospheric and Vacuum Robots and substrate handling products to the industy. Rorze has already an installed base for leading edge products for the 450mm platform, EUV substrate handling and Custom cluster for High Throughput Screening applications

Ultra Thin Wafer Handling

ESC Performance Data Applications

Process Carrier Size Evaluation Tool Available
PVD/CVD Standard HT BSGC-C HT 4"-12" Endura/Producer
Etch PR+BSGC HT 6"/8" STS Pegasus Bosch Process QI 2011
ECD Standard HT 4"-12" Semitool Equinox
CMP Back Grinding / Standard HT ? Mirra? ?

© 2012 Rorze Automation.. All rights reserved Managed by SandRiver Technologies